4.4 Article

One-dimensional structure of boron nitride on chromium (110) - a study of the growth of boron nitride by chemical vapour deposition of borazine

期刊

SURFACE SCIENCE
卷 602, 期 22, 页码 3467-3476

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ELSEVIER
DOI: 10.1016/j.susc.2008.06.037

关键词

Boron nitride; Chromium; Low energy electron diffraction (LEED); X-ray photoelectron spectroscopy (XPS); X-ray photoelectron diffraction (XPD); Chemical vapour deposition (CVD)

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The nucleation and growth of boron nitride films on a chromium (110) surface by thermal decomposition of borazine (HBNH)(3) was investigated by low energy electron diffraction (LEED), X-ray photoelectron spectroscopy (XPS) and X-ray photoelectron diffraction (XPD). The boron nitride film forms a chemically non-uniform one-dimensional superstructure with short range order along the [1 (1) over bar0] direction and long range order along [001]. Moreover, the thermal stability of the resulting BN film was investigated and a chemical reaction with the substrate was observed leading to the formation of Cr-B- and Cr-N- bonds at the interface and indicating the onset of the formation of hard boride and nitride phases in the system CrB-N. (C) 2008 Elsevier B.V. All rights reserved.

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