Development of organic SIMS system with Ar-GCIB and IMS-4f

We have developed Ar-gas cluster ion beam (GCIB) dynamic secondary ion mass spectrometry system by introducing Ar-GCIB column to IMS-4f. Mass spectrums of arginine and polystyrene (PS) are obtained with typical fragment ions. Depth profiles of PS are obtained within 10nm depth resolutions. Secondary ion images of fine-patterned PS are observed within 10 mu m image resolutions. Copyright (c) 2014 John Wiley & Sons, Ltd.