期刊
SURFACE AND INTERFACE ANALYSIS
卷 42, 期 1, 页码 40-44出版社
JOHN WILEY & SONS LTD
DOI: 10.1002/sia.3138
关键词
adventitious carbon; plasma; plasma cleaning; plasma source; hydrocarbons; sample cleaning
资金
- NASA LASER [NNX08AX11G]
- Cosmochemistry [NNX08AG72G]
A low-energy, constricted-a node Anders-type plasma source was built and tested for the chemical removal of adventitious carbon on surfaces. Oxygen plasma, generated in the source, extends to the sample surface through an aperture in the anode. This plasma reacts with surface hydrocarbons and removes them in less than a minute without influencing the intrinsic surface stoichiometry of nonoxidizing samples such as minerals, glasses, and metal oxides. Adventitious carbon removal is critical for accurate binding energy determination and quantitative measurements in XPS and AES, particularly in multicomponent materials. We measure the plasma to be composed primarily of O(+) and O(2)(+), with minor H(+), H(2)(+), and O(++) components. Ion energy distributions were measured for O(+) and O(++) and show all emitted ions have energies less than 50 eV, confirming chemical desorption as the primary removal mechanism. The plasma source, easily built 'in house', is compact and can be mounted on a 2.75-in flange for in situ specimen cleaning prior to surface analysis. Copyright (c) 2009 John Wiley & Sons, Ltd.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据