期刊
SURFACE & COATINGS TECHNOLOGY
卷 235, 期 -, 页码 803-810出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2013.06.114
关键词
Surface finishing; Ion beam irradiation; Micro-punching; Micro-hole; Metal foil
资金
- National Natural Science Foundation of China [50835002, 51105102]
- National Basic Research Program of China [2012CB934100]
- Postdoctoral Science Foundation of China [2011M500659]
- Scientific Research Foundation of Harbin Institute of Technology [HIT.2011.513]
Non-contact surface finishing processes have become an important issue in fabricating micro-die for micro-forming technology. In the paper, surface finishing processes of WC-Co flat sample and micro-punch having ultrafine grains were carried out by ion beam irradiation with Ar ion beam. The surface roughness R-a value of micro-punch was decreased from submicron to nano-scale and the profile accuracy was improved significantly compared with the original sample fabricated by micro-grinding. Moreover, the ultrafine grain microstructure can still be intact after ion beam bombardment with irradiation time of 240 min. Micro-punching tests of metal foil were conducted with ion beam finished micro-punch and micro-holes of 400 mu m and 600 mu m in diameters were punched with good dimensional accuracy. The surface roughness of cross-section of micro-inner-hole was decreased from 0.22 mu m to 40 nm. Therefore, surface finishing process by ion beam irradiation can effectively improve surface quality of micro-die for micro-punching with no apparent damage due to the non-contact polishing. (C) 2013 Published by Elsevier B.V.
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