期刊
SURFACE & COATINGS TECHNOLOGY
卷 231, 期 -, 页码 599-603出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2012.07.033
关键词
IMC; Wire bond; Cu ball bond; Diffusion barrier; Crack
资金
- National Science Council [99-2221-E-006-131, 100-2628-E-006-025-MY2, 98-2221-E-006 -065-MY3]
The interfacial reactions of the Pd-plated Cu (Pd-Cu) ball bond and 4N Cu (Cu) ball bond on Al were investigated through PCT (Pressure Cooker Test) and HTST (High Temperature Storage Test) tests. The thickness of the interfacial Cu-Al IMC increases as the testing time increases. The Cu-Al IMC growth rate was found to be slower in the Pd-Cu ball bond than in the Cu ball bond. The growth of the IMC is diffusion-controlled during aging. During the test the Pd diffuses from the interior of the Pd-Cu ball toward the bond interface. FIB (Focus Ion Beam) studies show crack formation at the Cu-Al IMC/Al interface in the Cu ball bond. During aging, the Pd-rich layer affected the interdiffusion between Cu and Al and may influence the IMC formation. The Pd-Cu ball bond showed better bonding reliability than the Cu ball bond in all tests. (C) 2012 Elsevier B.V. All rights reserved.
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