4.5 Article

Solution-processed ZnO nanoparticle-based semiconductor oxide thin-film transistors

期刊

SUPERLATTICES AND MICROSTRUCTURES
卷 44, 期 6, 页码 761-769

出版社

ACADEMIC PRESS LTD- ELSEVIER SCIENCE LTD
DOI: 10.1016/j.spmi.2008.09.002

关键词

Zinc oxide; Oxide semiconductor; Transistor; Nanoparticles

资金

  1. Ministry of Science and Technology [R0A-2005000-10011-0]
  2. LG Display

向作者/读者索取更多资源

We have prepared solution-processed oxide semiconductor thin-film transistors using ZnO nanoparticles with various particle shapes. Uniform, dense, thin films were produced by spin-coating ZnO nanoparticle dispersions containing either nanorods or nanospheres. The influence of annealing atmosphere on both nanoparticle-based TIT devices was investigated. XPS analysis revealed that the ZnO particles of the nanorod and nanosphere dispersions have distinct stoichiometries (i.e., molar ratios of Zn:O). The starting particles in turn predetermine the carrier concentration within the annealed ZnO films, which in turn determines whether the device is a semiconductor or metallic conductor, depending upon the annealing atmosphere. Grain structures of the channel layer also play an important role in determining the device performance of the nanoparticle derived ZnO TFTs. (C) 2008 Elsevier Ltd. All rights reserved.

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