期刊
STRAIN
卷 44, 期 1, 页码 49-56出版社
BLACKWELL PUBLISHING
DOI: 10.1111/j.1475-1305.2008.00423.x
关键词
digital holography; nanometre measurement; phase shifting; three-dimensional displacement; windowed hologram
Phase-shifting digital holography is a new method for measuring the displacement distribution on the surface of an object. The authors previously proposed a windowed phase-shifting digital holographic interferometry (windowed PSDHI). This method provides accurate displacement distributions by decreasing the effect of speckle patterns. In this study, the method is extended to analyse three-dimensional displacement components in a microscope. Three object laser beams in the optical system are used. Four phase-shifted holograms are recorded for each object laser beam. The complex amplitude of each reconstructed light at the object is calculated by the Fresnel diffraction integral of the complex amplitude of the hologram. The reconstructed distance is obtained at the point with the maximum of the standard deviation of the intensities of the object reconstructed with changing the reconstruction distance. The three phase-difference values between before and after deformation provide the three-dimensional displacement components. Theoretical treatment and experimental results of three-dimensional displacement measurement using this method are shown.
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