期刊
SOLID-STATE ELECTRONICS
卷 53, 期 4, 页码 438-444出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.sse.2008.09.018
关键词
High-k gate stacks; HfO2; Reverse modeling; Direct tunneling; Electron effective mass; Electron affinity; Bulk properties; 32 nm and 22 nm technology nodes
资金
- PULLNANO [IST-026828]
- Science Foundation Ireland [05/IN/1751]
- Swiss National Science Foundation [NEQUATTRO SNF 200020-117613/1]
We present a combined electrical and modeling study to determine the tunneling electron effective mass and electron affinity for HfO2. Experimental capacitance-voltage (C-V) and current-voltage (J-V) characteristics are presented for HfO2 films deposited on Si(100) substrates by atomic layer deposition (ALD) and by electron beam evaporation (e-beam), with equivalent oxide thicknesses in the range 10-12.5 angstrom. We extend on previous studies by applying a self-consistent 1D-Schrodinger-Poisson solver to the entire gate stack, including the inter-layer SiOx region - and to the adjacent substrate for non-local barrier tunnelling - self-consistently linked to the quantum-drift-diffusion transport model. Reverse modeling is applied to the correlated gate and drain currents in long-channel MOSFET structures. Values of (0.11 +/- 0.03)m(0) and (2.0 +/- 0.25) eV are determined for the HfO2 electron effective mass and the HfO2 electron affinity, respectively. We apply our extracted electron effective mass and electron affinity to predict leakage current densities in future 32 nm and 22 nm technology node MOSFETs with SiOx thicknesses of 7-8 angstrom and HfO2 thicknesses of 23-24 angstrom. (C) 2008 Elsevier Ltd. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据