4.4 Article

Study of mechanism of stress-induced threshold voltage shift and recovery in top-gate amorphous-InGaZnO4 thin-film transistors with source- and drain-offsets

期刊

SOLID STATE COMMUNICATIONS
卷 152, 期 18, 页码 1739-1743

出版社

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.ssc.2012.06.012

关键词

Amorphous-indium-galium-zinc-oxide (a-IGZO); Thin-film transistor (TFT); Bias stability; Ion migration

资金

  1. Industrial Strategic Technology Development Program [10035225]
  2. MKE/KEIT

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Bias instability of top-gate amorphous-indium-gallium-zinc-oxide thin-film transistors with source- and drain-offsets is reported. Positive and negative gate bias-stress (V-G_STRESS) respectively induce reversible negative threshold-voltage shift (Delta V-TH) and reduction in on-current. Migration of positive charges towards the offsets lowers the local resistance of the offsets, resulting in the abnormal negative Delta V-TH under positive V-G_STRESS. The reduction in on-current under negative V-G_STRESS is due to increase in resistance of the offsets when positive charges migrate away from the offsets. Appropriate drain and source bias-stresses applied simultaneously with V-G_STRESS either suppress or enhance the instability, verifying lateral ion migration to be the instability mechanism. (C) 2012 Elsevier Ltd. All rights reserved.

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