期刊
SOLAR ENERGY MATERIALS AND SOLAR CELLS
卷 100, 期 -, 页码 153-161出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.solmat.2012.01.007
关键词
Solar cells; Transparent conducting electrodes
In this paper we present the physical properties of two types of multilayer structures: ITO/metal/ITO and ZnO/metal/ZnO obtained by successive sputtering depositions of metallic targets (In:Sn, Zn, Ag, Au) in reactive atmosphere (for oxide films) and under inert atmosphere (for metallic interlayer films). Very good quality transparent conducting thin films structures (rho=2 x 10(-5) Omega cm, T similar to 90%) were obtained. The morphological, optical and electrical properties were analyzed and compared for the multilayer films deposited in identical conditions on glass and PET substrates. The influence of substrate nature on the morphological properties is more pronounced in the case of zinc oxide films. The Haake figures of merit at lambda=550 nm are comprised between 4 x 10(-3) Omega(-1) and 29 x 10(-3) Omega(-1) in function of the nature of the metallic interlayer. The stability of electrical properties with the temperature of the oxide/metal/oxide films is remarkable in comparison with the usual behavior of single oxide films. (C) 2012 Elsevier B.V. All rights reserved.
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