4.7 Article

Another route to fabricate single-phase chalcogenides by post-selenization of Cu-In-Ga precursors sputter deposited from a single ternary target

期刊

SOLAR ENERGY MATERIALS AND SOLAR CELLS
卷 93, 期 8, 页码 1351-1355

出版社

ELSEVIER SCIENCE BV
DOI: 10.1016/j.solmat.2009.02.014

关键词

Selenization; Chalcopyrite; CIGS; Sputtering; Solar cells; Cu-In-Ga

资金

  1. National Science Council of the Republic of China (Taiwan) [NSC94-2622-E-035-021-CC3]

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Single-layered precursors comprising In and Cu(11)(In,Ga)(9) were fabricated by one-step sputtering of a Cu-In-Ga ternary target, subsequently covered by an evaporated Se layer as the source of post-selenization, involving low-temperature (100 degrees C) homogenization and high-temperature (>= 450 degrees C) chalcogenization treatments. Initially it appears that the post-selenization process is inappropriate to fabricate device-quality CIGS absorber layers because the composite precursor is converted into (In,Ga)(2)Se(3) and Cu(3)Se(2) with segregated phases and roughened topography. However, adequately controlling the processing steps leads to a fully microstructure-homogenized precursor, offering a new route and chemical reaction process to fabricate Cu(In,Ga)Se (CIGS) absorber layer with sounding crystallinity. (C) 2009 Elsevier B.V. All rights reserved.

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