期刊
SOLAR ENERGY MATERIALS AND SOLAR CELLS
卷 93, 期 9, 页码 1598-1607出版社
ELSEVIER
DOI: 10.1016/j.solmat.2009.04.023
关键词
Amorphous; Silicon; Microcrystalline; Large area; VHF-PECVD; Solar cells
资金
- German Bundesministerium fur Umwelt
- Naturschutz und Reaktorsicherheit (BMU) [0329563E]
Amorphous and microcrystalline silicon single layers and p-i-n solar cells were produced dynamically using an inline deposition system called line source. A highly uniform deposition of thin-film silicon layers with layer-thickness variations of less than +/- 5% was achieved. Amorphous and microcrystalline silicon single junction solar cells were dynamically fabricated with initial efficiencies of 8.3% and 6.3%, respectively. The dynamic deposition rate of these solar cells is 6.75 nm m/min in case of a-Si:H and 3.3 nm m/min for mu c-Si:H. In this work it will be shown that an enhancement of the deposition rate up to 15,6 nm m/min during the i-layer deposition of a-Si:H solar cells has only a weak negative influence on the initial efficiencies of the cells. Further on, the effect of substrate velocity on solar cell characteristics of a-Si: H solar cells is investigated. Finally, a productivity estimation of the line source concept is presented. (C) 2009 Elsevier B.V. All rights reserved.
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