期刊
SOLAR ENERGY MATERIALS AND SOLAR CELLS
卷 92, 期 11, 页码 1373-1377出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.solmat.2008.05.011
关键词
heterojunctions; HIT cells; texturing; surface treatments; lifetime
Heterojunction solar cells have potential for very high device voltages and currents, yet this relies on correct preparation of wafer surfaces prior to amorphous silicon (a-Si) deposition. This paper investigates the preparation of wafer surfaces by NaOH texturing and thinning prior to a-Si intrinsic layer deposition. It is found that with a CP etch or low-temperature anneal, and with correct deposition parameters, effective wafer lifetimes in excess of I ms can be achieved, indicating excellent surface passivation. Low reflectance achieved following wafer texturing along with high wafer lifetime led to efficiencies in finished devices as high as 17.6%. (C) 2008 Elsevier B.V. All rights reserved.
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