4.6 Article

Thickness dependent hierarchical meso/nano scale morphologies of a metal-containing block copolymer thin film induced by hybrid annealing and their pattern transfer abilities

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Review Materials Science, Multidisciplinary

Block copolymer lithography: Merging bottom-up with top-down processes

CJ Hawker et al.

MRS BULLETIN (2005)

Review Materials Science, Multidisciplinary

Patterning with block copolymer thin films

RA Segalman

MATERIALS SCIENCE & ENGINEERING R-REPORTS (2005)