4.6 Article

Interfacial fluctuations in an ideal block copolymer resist

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Review Materials Science, Multidisciplinary

Patterning with block copolymer thin films

RA Segalman

MATERIALS SCIENCE & ENGINEERING R-REPORTS (2005)