Top-Down Nanomechanical Machining of Three-Dimensional Nanostructures by Atomic Force Microscopy

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卷 6, 期 6, 页码 724-728

WILEY-V C H VERLAG GMBH

atomic force microscopy; nanofabrication; nanostructures; top-down processes

Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter

1. National Natural Science Foundation of China [50605012]
2. 111 Project [B07018]
3. China Postdoctoral Science Foundation
4. University of South Carolina NanoCenter