期刊
SMALL
卷 5, 期 3, 页码 400-406出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.200800923
关键词
metamaterials; nanolithography; nanoparticles; nanostructures; resonators
类别
资金
- Deutsche Forschungsgemeinschaft [FOR557, FOR730]
- BMBF [13N9155]
A fast and cheap, large-area (>1 cm(2)), high-coverage fabrication technique for periodic metallic split-ring resonator metamaterials is presented, which allows control of inner- and outer-ring diameters, gap angles, as well as thickness and periodicity. This method, based on shadow nanosphere lithography, uses tilted-angle-rotation thermal evaporation onto Langmuir-Blodgett-type monolayers of close-packed polystyrene nanospheres. Excellent agreement of the process parameters with a simplified model is demonstrated. Pronounced, tunable optical metamaterial resonances in the range of 100 THz are consistent with simulations.
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