期刊
SMALL
卷 4, 期 10, 页码 1605-1609出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.200800280
关键词
lithography; microcontainers; self-assembly; thin-film stress
类别
资金
- Arnold and Mabel Beckman Foundation
- Camille-Dreyfus Foundation
- National Science Foundation [Career-DMMI 044816]