期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 193, 期 -, 页码 280-287出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2013.11.069
关键词
ZnO; Humidity sensors; Nanowires; Nanosheets; Relative humidity
资金
- National Science Council (NSC) of Taiwan, Republic of China [NSC 100-2221-E-006-045 MY2, NSC 100-2221-E-006-156 MY2]
- National Nano Device Laboratories
- Center for Micro/Nano Science and Technology, National Cheng Kung University, Taiwan
This study investigates the effectiveness of using laterally oriented zinc oxide (ZnO) nanosheets (NSs) grown by the hydrothermal growth (HTG) method for relative humidity (RH) sensing at room temperature (RT). A sensing response (R12%/R96%) at RT of as high as 220, good sensing linearity in the range of 12-96% RH, a fast sensing response time of as low as 600 s, and a recovery time of 3s are achieved. Compared to conventional ZnO-nanowire-based humidity sensors, a 100-fold improvement in the sensing response at RT was obtained, which is mainly attributed to the ZnO NSs having a much higher surface-to-volume ratio and a porous-like surface. (C) 2013 Elsevier B.V. All rights reserved.
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