期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 194, 期 -, 页码 173-179出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2013.12.063
关键词
Flexible sensor; VOC sensing; Multi-walled carbon nanotube; Gold nanoparticle; Polyimide
资金
- FP7 [PEOPLE-2011-CIG-303779]
- TUBITAK [111M510]
- Materials Institute of TUBITAK Marmara Research Center
Novel flexible volatile organic compound (VOC) sensor was prepared by deposition of gold nanoparticle (AuNP) and amine modified multi-walled carbon nanotubes (MWCNT-NH2) on polyimide substrate via electrospraying technique. First, interdigitated electrodes (IDE) were fabricated on polyimide (Kapton (R)) substrate by photolithography. Then, the substrates were subjected to oxygen plasma etching, followed by electrospraying of AuNP and MWCNT-NH2 solution on the substrate. The thin films were characterized by FE-SEM and AFM as well as electrical conductivity measurement. Chemical sensing behaviors of the sensors were analyzed against polar (water, propanol and ethanol) and nonpolar (hexane, toluene, trichloroethylene and chloroform) VOCs. In addition, effect of the AuNP/MWCNT-NH2 ratio on the conductivity and sensing was investigated. Bending test (100 times) resulted in negligible resistance change, demonstrating the successful preparation of flexible sensor. (C) 2013 Elsevier B. V. All rights reserved.
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