期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 195, 期 -, 页码 123-131出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2013.12.117
关键词
Moisture sensor; Interdigitated electrode capacitor; Flexible electronics; RFID tag
资金
- Junta de Andalucia, Spain [P10-TIC-5997]
- Project CEI BioTIC [CEI-2013-P-2]
- European Regional Development Funds (ERDF)
Small, low-cost and flexible humidity sensors were designed, fabricated by using an inkjet-printing process, and fully characterized. Based on the principles of the capacitor and the ability of a polyimide to absorb humidity, the sensor was fabricated by printing silver interdigitated electrodes on a thin polyimide film of 75 pin thickness. After modeling, the total area of the printed sensor was optimized to be 11.65 mm(2). A relative humidity sensitivity of 4.5 fF/%RH and a thermal coefficient of -0.4 fF/degrees C were measured at 100 kHz, whereas the sensitivity and the thermal coefficient were 4.2 fF/%RH and -0.21 fF/degrees C, respectively, at 1 MHz. This latter result implies that it could not be necessary to include thermal compensation to use this sensor depending on the required accuracy and the chosen frequency. This work shows a reliable, fast, simple and low-cost manufacturing process to make small humidity sensors with low thermal drift and high temporal stability. These sensors could be easily integrated into inkjet-printed RFID tags for monitoring of environmental humidity in diverse applications. (C) 2014 Elsevier B.V. All rights reserved.
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