期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 187, 期 -, 页码 540-545出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2013.03.079
关键词
Palladium; Hydrogen gas sensor; MEMS; RF magnetron sputtering; Nano-bumpy structure
资金
- Fundamental R&D Program for Core Technology of Materials
- Ministry of Knowledge Economy
- Basic Science Research Program through the National Research Foundation of Korea (NRF)
- Ministry of Education, Science and Technology [2010-0022715]
- National Research Foundation of Korea [2010-0022715] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
A microhydrogen gas sensor platform was fabricated by a MEMS process. A nano-bumpy structure was produced using a polystyrene aqueous suspension to develop the surface areas of the sensing area (palladium thin film). The palladium film was deposited on a fabricated platform by a radio frequency magnetron sputtering. A cross section of each AFM image was analyzed to determine the mean surface roughness. The root-mean square roughness of the 1-layer nano-bumpy Pd structure and 2-layers nano-bumpy Pd structure were 9.07 nm and 13.1 nm, respectively, whereas that of the Pd thin film was 0.98 nm. The sensitivities of the Pd thin film sensor, mono-layer nano-bumpy sensor and double-layers nano-bumpy sensor at hydrogen gas concentrations of 2000 ppm was 0.638%, 1.045% and 1.511%, respectively. (C) 2013 Elsevier B.V. All rights reserved.
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