期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 166, 期 -, 页码 378-385出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2012.02.076
关键词
SnO2-CuO multilayer; H2S sensor; Thin film; Pulsed laser deposition
资金
- Department of Science and Technology (DST)
- National Programme for Micro and Smart Systems (NPMASS)
- Department of Information Technology (DIT), Government of India
- CSIR
Sensing response characteristics of bare SnO2 thin film and SnO2-CuO multilayered structures having different CuO content (3 vol%, 6 vol% and 12 vol%) towards 20 ppm H2S gas has been studied. SnO2-CuO multilayered structure having an optimum amount of 3 vol% CuO is found to exhibit a high response of 2.7 x 10(4) at a relatively low operating temperature of 140 degrees C, with a fast response time (t(90)) of 2s. The enhanced sensing response and the fast response speed are due to the porous microstructure of the deposited thin films in the multilayered sensor structures and the spill-over of the dissociated H2S gas molecules by the CuO layers on the surface of sensing SnO2 layers. (C) 2012 Elsevier B.V. All rights reserved.
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