期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 174, 期 -, 页码 258-262出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2012.07.011
关键词
Mn-doped; Zinc oxide; Humidity sensor; Nanopowders
资金
- UPR-DEGI
- NASA-EPSCoR
Mn-doped ZnO nanopowders have been prepared by the sol-gel technique using zinc and manganese (II) acetates as precursors. The as-prepared nanopowders were characterized by scanning electron microscopy and Micro-Raman spectroscopy. Humidity sensors based on ZnO nanopowders with different Mn concentrations of 0, 1,3 and 6 at% were fabricated. Linear behavior of the I-V curves at various relative humidity (RH) indicates the ohmic contact between the sensing material and gold electrodes. Sensing characterization reveals that the 6 at% Mn-doped ZnO nanopowders have linear response to RH over the range of 11-95%, which offers higher sensitivity than the commonly reported exponential response. The response and recovery time of the sensor are 6s and 20s, respectively, versus the changes of RH from 20% to 80%. The sensors with high reproducibility and stability, as well as high sensitivity throughout a large dynamic range have been obtained. (C) 2012 Elsevier B.V. All rights reserved.
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