4.7 Article

Improving the ethanol sensing of ZnO nano-particle thin films-The correlation between the grain size and the sensing mechanism

期刊

SENSORS AND ACTUATORS B-CHEMICAL
卷 152, 期 1, 页码 73-81

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2010.09.045

关键词

ZnO:Sn thin films; Neck-controlled sensitivity; Ethanol sensing; Sol-gel process

资金

  1. KRCF (Korea Research Council of Fundamental Science Technology)
  2. SKKU (Sungkyunkwan University)
  3. National Research Council of Science & Technology (NST), Republic of Korea [krcf-2011-1] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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ZnO and Sn doped ZnO (ZnO:Sn) thin films at various doping concentrations from 1 to 10 at.% were prepared by the sol-gel method for an ethanol sensing application. The Sn doping significantly influenced the film growth, grain size and response of the films. The XRD patterns showed that the hexagonal wurtzite structure of the ZnO film was retained even after the Sn doping. The crystallite grain sizes of the ZnO:Sn thin films at 0,2 and 4 at.% were estimated by using the typical Scherrer's equation. The crystalline quality of the films at 6, 8 and 10 at.% of Sn was degenerated. Typical FESEM images demonstrated the different morphologies for the ZnO:Sn thin films at various Sn concentrations; many pores of various dimensions were observed depending on the doping level. A TEM analysis of the ZnO:Sn thin films at 0, 2 and 4 at.% was performed to verify the grain size. The optimum Sn doping level of ZnO:Sn thin film for ethanol sensing was estimated to be 4 at.%. The 4 at.% sample obtained the highest response to ethanol vapor in the 10-400 ppm level range at a low operating temperature of 250 degrees C. The sensing mechanism was explained by a variation in the sensitivity model from a neck-grain-boundary controlled sensitivity to a neck-controlled sensitivity. Our work demonstrates the ability to reduce the working temperature as well as to increase the response of ZnO thin film based gas sensors to detect ethanol, which would be of great merit for commercialized applications. (c) 2010 Elsevier B.V. All rights reserved.

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