期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 143, 期 2, 页码 555-560出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2009.09.062
关键词
Resonant microcantilever; Chemical detection; Gas mass density; Gas viscosity; Binary mixture
资金
- EADS Foundation
Chemical sensors based on vibrating Silicon microcantilevers without sensitive coating are investigated herein. The sensor signal is the relative variation of the microcantilever resonant frequency which depends on both the viscosity and the density of the fluid surrounding the microcantilever. This principle has been applied to the detection of binary gas Mixtures. Experimental data for He/N-2 and CO2/N-2 environments are presented and compared to results of theoretical modeling. The advantages of such a gas sensor based on changes of physical properties are discussed (response time, sensitivity, selectivity, stability). (C) 2009 Elsevier B.V. All rights reserved.
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