期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 136, 期 2, 页码 489-493出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2008.12.026
关键词
Gas sensor; SrTiO(3); Atomic layer deposition
资金
- Ministry of Economy, Trade and Industry
A strontium titanate (SrTiO(3)) thin Him showed high oxygen sensitivity oil the ppb order at room temperature. The sensitivity is enough to monitor oxygen contamination in semiconductor manufacturing processes, which is becoming increasingly important as semiconductor devices are scaled clown to the nanometer generation. The SrTiO(3) film was prepared using atomic layer deposition (ALD),which has been established and found suitable for mass production. (C) 2008 Elsevier B.V. All rights reserved.
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