Oxygen sensitivity of SrTiO3 thin film prepared using atomic layer deposition

A strontium titanate (SrTiO(3)) thin Him showed high oxygen sensitivity oil the ppb order at room temperature. The sensitivity is enough to monitor oxygen contamination in semiconductor manufacturing processes, which is becoming increasingly important as semiconductor devices are scaled clown to the nanometer generation. The SrTiO(3) film was prepared using atomic layer deposition (ALD),which has been established and found suitable for mass production. (C) 2008 Elsevier B.V. All rights reserved.