4.7 Article

MEMS-based semi-packed gas chromatography columns

期刊

SENSORS AND ACTUATORS B-CHEMICAL
卷 141, 期 1, 页码 309-315

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2009.06.022

关键词

Gas chromatography; MEMS; mu GC; Separation columns; Semi-packed

资金

  1. National Science Foundation [ECCS 0601456]
  2. Bradley Department of Electrical and Computer Engineering of Virginia Tech

向作者/读者索取更多资源

Separation of complex gaseous mixtures using gas chromatography (GC) is an important process in analytical systems for environmental monitoring, medical diagnosis, and forensic sciences. Miniaturizing CC columns using microfabrication techniques is an important step in achieving micro-total analytical systems (mu TAS) as complete lab-on-a-chip devices. This paper reports the fabrication and performance of a new generation of silicon-on-glass MEMS-based GC columns named semi-packed. These columns, fabricated on a 1.8 cm square die in a double square spiral layout, are 1-m long, 150-mu m wide, and 180-deep and contain embedded square posts which are 20 mu m on a side. The posts increase the overall Surface area of the columns and reduce the effective width of the column to 126 mu m. The semi-packed columns achieved a higher separation efficiency and sample capacity as compared to their open rectangular counterparts without significant eddy diffusion effects or drops in pressure which are common issues with conventional packed columns. The semi-packed column achieved a separation efficiency of about 10,000 plates/m which is the highest reported, to date, by a MEMS-based column with comparable outer dimensions. (C) 2009 Elsevier B.V. All rights reserved.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.7
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据