Investigation on formaldehyde gas sensor with ZnO thick film prepared through microwave heating method

ZnO nanopowders were prepared through microwave heating method. ZnO thick film sensors were fabricated by using ZnO nanopowders as sensing materials. The phase composition and morphology of the material particles were characterized by means of X-ray diffraction (XRD) and transmission electron microscopy (TEM), respectively. The gas-sensing properties of the sensors based on ZnO nano-materials were investigated. It was found that the sensor based on ZnO nano-materials (low power, 10x 10 min) exhibited very high responses to benzene and toluene when operating at 440 and 370 degrees C, respectively; but the sensor based on ZnO (low power, 10x 10 min) showed very low responses to benzene and toluene when operating at 205-215 degrees C. The sensor based on ZnO (low power, 10x 10 min) showed high response and good selectivity to dilute formaldehyde when operating at 210 degrees C; especially, the response to 0.001 ppm HCHO attained 7.4 when operating at 210 degrees C. (c) 2009 Elsevier B.V. All rights reserved.