期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 141, 期 1, 页码 322-328出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2009.06.021
关键词
Gas chromatography; MOX; Benzene; MEMS; Environmental monitoring; uTAS
资金
- Italian Ministry for University [RBNE019TMF]
- Regione Emilia Romagna
Micromachined gas-chromatographic (CC) components in combination with high sensitivity MOX detectors and novel pre-concentration materials were utilized to develop a miniaturized, portable, stand-alone sub-ppb level monitoring system for aromatic volatile organic compounds (VOC). Using metal oxide semiconductor (MOX) gas sensors as detectors in a CC system, the intrinsic analytic selectivity of CC is exploited in a simplified architecture with on-board generated carrier gas. The work reported here includes the study of innovative pre-concentration materials, the micromachining of CC components and devices, the fabrication and characterization of complete system prototypes, and the development of application-specific control electronics. The results of both laboratory trials and successful real-world cross-validation with a reference analyzer are described. (C) 2009 Elsevier B.V. All rights reserved.
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