期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 135, 期 2, 页码 587-591出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2008.10.023
关键词
Carbon nanotube arrays; Metal-sitting passivation; Inkjet printing; Wafer-scale; Gas sensor units; NO2; CO
资金
- Ministry of Education, Science and Technology (MEST) [NM 6390]
- Korea Institute of Machinery and Materials (KIMM) in Korea [KM 1700]
Highly sensitive single wall carbon nanotube (CNT)-embedded gas sensor units were fabricated by the mass production scheme. The wafer-scale produced sensor units provide repeatable sensing performances to 10ppb level of NO2 and the distinctive response to CO. Inkjet approach was applied to deposit CNTs to be arrayed on a 4 in. wafer at designated positions and controlled the density of CNT arrays with reliable accuracy. Metal deposition above the CNT arrays forms the metal-sitting structure providing a good Ohmic contact formation, which also ensures the active CNT responses to gas molecules with less effect from the metal contacts. We discuss the reaction mechanism of CNTs to gas species and mass production schemes of sensor units on a wafer-scale. (c) 2008 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据