Ozone sensors based on SnO2 films modified by SnO2-Au nanocomposites synthesized by the SILD method

We consider the influence of surface modification by SnO2-Au nanocomposites on the conductivity response of SnO2 films to ozone. SnO2-Au nanocomposites with an Au/Sn ratio similar to 1 were synthesized by the Successive Ionic Layer Deposition (SILD) method. The thickness of the Au-SnO2 nanocomposites deposited on the surface of the SnO2 films was controlled through a change of the number of deposition cycles. It was established that the indicated modification promotes optimization of sensor parameters. It was shown that sensors with a modified Surface had a higher sensitivity to ozone and a shorter recovery time. An explanation of the observed effects is given. (C) 2009 Elsevier B.V. All rights reserved.