期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 134, 期 2, 页码 796-802出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2008.06.032
关键词
Gas sensor; Tin oxide; Nanocrystalline films; Spray pyrolysis
A new gas sensor based on ultrathin SnO2-films with high sensitivity for humidity and carbon monoxide has been developed. The SnO2-sensing films are fabricated by a spray pyrolysis process with a thickness between 50 and 100 nm on oxidized silicon substrates. The SnO2-sensing films are finally processed in arrays of parallel bars to achieve the sensor device. The structure of SnO2-layers has been characterized by SEM, AFM and XPS analysis. The sensors are operated at temperatures of 250-400 degrees C, show high sensitivity to humidity and are able to detect carbon monoxide down to a concentration of less than 5 ppm. The fabrication process of the gas sensor is fully compatible with silicon process technology.The spray pyrolysis technique is a simple and flexible process and thus is suitable for the cost efficient fabrication of a new gas-sensing device. Strategies to improve sensitivity and selectivity of the sensor toward different gas species are discussed. (C) 2008 Elsevier B.V. All rights reserved.
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