4.7 Article

The superior performance of the electrochemically grown ZnO thin films as methane sensor

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SENSORS AND ACTUATORS B-CHEMICAL
卷 133, 期 2, 页码 357-363

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ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2008.02.035

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nanoporous ZnO; electrochemical anodization; MIM configuration; methane sensing; Pd-Ag (26%) and Rh catalytic metal contacts

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Pd-Ag/ZnO/Zn and Rh/ZnO/Zn MIM (metal-insulator-metal) gas sensors were fabricated using nanoporous ZnO thin films, obtained by an electrochemical deposition method in the absence and presence of UV light. A high-purity Zn anode, a Pt cathode, a calomel reference electrode and a 0.3-M oxalic acid electrolyte were used for deposition. Pd-Ag (26%) and Rh were used separately as the catalytic metal electrodes to fabricate the two different types of MIM Configurations. A gas response of the order of 3.85 +/- 2, a response time of 5 +/- 0.5 s and a recovery time of 16 +/- 0.5 s were obtained with the Pd-Ag contact, while the Rh contact showed a response of the order of 4.82 +/- 2, a response time of 24 +/- 0.5 s and a recovery time of 72 +/- 0.5 s, at the optimum temperature of 220 degrees C, which is the lowest temperature so far reported for metal oxide sensors to sense 1% methane in a N-2 carrier gas. The undoped zinc oxide thin films grown by UV-assisted electrochemical anodization of high-purity Zn demonstrated a better performance for methane sensing. The experiments were repeated in synthetic air and a somewhat reduced performance was observed. The selectivity in the presence of hydrogen and the stability of the sensors were studied. (C) 2008 Elsevier B.V. All rights reserved.

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