期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 134, 期 2, 页码 390-395出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2008.05.014
关键词
Microcantilever; Sensor; Porous aluminum oxide; Surface stress; Resonance frequency
资金
- NSF [SGER ECCS-0643193]
- NSF MRI [0618291]
- Board of Regent Industrial Ties and Research [LEQSF(2005-04)-RD-B-19]
- Directorate For Engineering
- Div Of Civil, Mechanical, & Manufact Inn [0618291] Funding Source: National Science Foundation
Two types of aluminum oxide (A(2)O(3)) modified microcantilevers (MCLs) were tested for their sensitivity and reproducibility for detection of low levels of moisture. Aluminum was sputtered on the MCLs and oxidized to Al2O3 through thermal oxidation (Method 1) and anodization method (Method 11). Both deflection and frequency change of the MCLs were investigated. Thermally treated MCLs showed a 16 +/- 2 nm deflection and a 25 Hz change in resonant frequency, i.e., a mass change of 1.85 x 10(-11) g, to a 200 ppm level of moisture. MCLs from Method 11 showed a 95 +/- 5 nm deflection and a 340 Hz change in resonant frequency, i.e., a mass change of 41.76 x 10(-11) g. to the 200 ppm level of moisture. The MCLs' response time to moisture was less than 3 min using the deflection mode, and less than 25 s using the frequency method. The MCLs prepared by Method II demonstrated a higher sensitivity toward moisture measurement due to the larger surface area of the porous Al2O3 coating. The comparison also suggests that the frequency responses of microcantilever sensors to moistures are much faster than the deflection responses. These sensors were stable for months stored under ambient conditions. The bending amplitudes and frequency change were proportional to the moisture level, and the detection of moisture was not affected by alcohols in the environment. (C) 2008 Elsevier B.V. All rights reserved.
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