期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 131, 期 2, 页码 347-355出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2007.11.053
关键词
optical waveguide; evanescent-wave sensors; nanoimprint lithography; silicon oxynitride
A planar optical waveguide with an input grating coupler was used as a label-free biodetection device. Nanoimprint lithography was used to integrate the grating patterns with low loss silicon oxynitride thin film waveguides. A widely tunable laser source at 1550 nm was used to characterize the device sensitivity to bulk medium changes, to thin film adsorption, and to protein binding. For each test, a comparison was performed between the sensitivity of wavelength interrogation and the more standard angular interrogation approach. The results indicate that these devices used in wavelength interrogation with a telecom laser source are perfectly suited to be integrated in compact and sensitive biodetection systems. (C) 2007 Elsevier B.V. All rights reserved.
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