期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 132, 期 2, 页码 397-403出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2007.10.007
关键词
ORMOCER; capillary electrophoresis; bonding; lithography; embossing
We present a fabrication process for ORMOCER microfluidic devices. Organically modified ceramics (ORMOCER (R) s) are a new interesting group of materials, which provide fast and easy processing and favorable Surface properties. In patterning ORMOCER behaves as negative photoresist and both UV-lithography and UV-embossing are used to fabricate structures. Oxygen plasma-treated PDMS cover is irreversible bonded to ORMOCER channel wafer for capillary electrophoresis (CE) chip fabrication. Electro-osmotic mobility is measured using ORMOCER/PDMS microchannels with different buffer conditions and found somewhat similar to glass. Contact angle measurements also indicate glass-like behavior in surface properties. Peptide separations are demonstrated using ORMOCER/PDMS CE chip. ORMOCER/ORMOCER bonding for single material fluidic devices with integrated fabrication of fluidic inlets promises more applications for this novel material. (c) 2007 Elsevier B.V. All rights reserved.
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