期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 128, 期 2, 页码 407-413出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2007.06.029
关键词
humidity sensor; sol-gel; multilayered structures; stability
In the present work, we describe humidity sensing properties of nano-structured multilayered TiO2:ZrO2 ceramic thin films prepared by sol-gel processing. An enhancement in the sensitivity is observed for both TiO2/ZrO2 (TZ) and ZrO2/TiO2 (ZT) thin film samples that are annealed at 400 degrees C, due to simultaneous crystallization of ZrO2 and TiO2. The multilayered ZrO2:TiO2 thin film shows less drift and low hysteresis compared to pure TiO2. The experimental data are fitted to an equivalent circuit containing a resistance and a non-Debye capacitance in parallel. Typical response and recovery time of the sensor are 56 and 124 s, respectively. We demonstrate the possibility of a practical device without heating the humidity sensitive element for regeneration. (C) 2007 Elsevier B.V. All rights reserved.
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