期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 283, 期 -, 页码 235-244出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2018.09.060
关键词
Ultrafine particles; Particle number concentration; Particle detection system
资金
- Technology Innovation Program - Ministry of Trade, Industry & Energy (MOTIE, Korea) [10077651]
- Korea Evaluation Institute of Industrial Technology (KEIT) [10077651] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
A MEMS-based particle detection system which includes a particle processing chip and electronic circuits was developed for low-cost and ubiquitous monitoring of airborne ultrafine particles. The detection system consists of particle classification, charging, precipitation, and sensing sections. Particles with different sizes enter the ultrafine particle processing chip and are separated according to their sizes in the classification section. Size-classified particles are charged in the charging section. Then, the mean size and particle concentrations are determined in the precipitation and sensing sections. The particle classification, charging, and precipitation sections were integrated on a single chip using MEMS and microfluidic technologies. The particle sensing section was realized using a metal filter connected to a high-precision electrometer. The characteristics of each section were first analyzed, and the proposed particle detection system was then compared with standard commercially available instruments. The calculated particle number concentrations correspond to the results measured by commercially available instruments. The proposed particle detection system can be applied for monitoring of ultrafine particles with size range of 20-300 nm (20-130 nm particle mean diameter) and concentration range of 320-10(6) particles/cm(3). (C) 2018 Elsevier B.V. All rights reserved.
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