期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 211, 期 -, 页码 78-88出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2014.03.012
关键词
Electrospinning; Interdigital electrode; Nanofiber; PVDF; MWCNT; Sensing
资金
- National Science Council of Taiwan [NSC-100-2628-E-110-006-MY3]
This study reports the electrospinning of polyvinylidene fluoride (PVDF) piezoelectric nanofiber array on an interdigital (IDT) electrode to fabricate a flexible sensing device. This sensing device can convert the mechanical energies of low-frequency ambient vibrations and impacts into electrical signals. A mixed solution of PVDF and multi-wall carbon nanotube (MWCNT) was filled in a metallic needle injector that was connected with a high voltage of 1200 V. When the PVDF droplet in the needle tip was subjected to a high electric field, an extremely fine PVDF fiber can be spun out. The electrospun fibers were collected orderly using an X-Y stage. In the electrospinning process, the fiber was polarized and transformed into the piezoelectric beta-crystalline phase. PVDF/MWCNT crystallization as spherical composite structures can enhance the piezoelectric properties of PVDF fibers. Photolithography and etching processes were used to fabricate an IDT electrode with a gap of 100 mu m on a flexible polyimide (PI) substrate. The PVDF fiber array was packaged with epoxy/PI film. The packaged PVDF fiber array was repolarized in a high electric field of approximately 7V/mu m to increase d(33) mode conversion efficiency. The comparison of the analytical solution of the composite plate equation and the experimental results shows that the device can generate a peak voltage and current of 20.2 mV and 39 nA under 6 Hz vibration. In addition, at an impact testing at 15 Hz, the peak voltage of 24.4 mV with a current of 130 nA can be obtained. (C) 2014 Elsevier B.V. All rights reserved.
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