期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 212, 期 -, 页码 12-17出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2014.03.016
关键词
Organo-mineral material; SNOM (Scanning Near-field Optical Microscopy) probe; Microtechnology; Cantilever; Tip nano-aperture; AFM (Atomic Force Microscopy)
资金
- French Agence Nationale de la Recherche, Pole Optitech [ANR-2011 EMMA-801-Siroco]
- MESR
We present the design, batch fabrication sequences and mechanical characterization of an optical nearfield probe. The probe structure is made of a hybrid organo-mineral material synthesized using a sol-gel process. The cantilever-type probe was designed for Scanning Near-field Optical Microscopy (SNOM) in collection mode and its design was optimized by simulations. The mechanical properties of the probes were measured and topographical images of a standard surface obtained with the fabricated probes are presented. (c) 2014 Elsevier B.V. All rights reserved.
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