期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 197, 期 -, 页码 30-37出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2013.04.007
关键词
Capacitive pressure sensor; Wireless; Low temperature co-fired ceramic (LTCC); Harsh environment; Sacrifice paste
资金
- National Basic Research Program of China (973 Program) [2010CB334703]
- National Natural Science Foundation of China [51075375]
This paper presents a wireless capacitive pressure sensor based on LTCC (low temperature co-fired ceramic) technology, where the design, fabrication, and measurement of the sensor is demonstrated and discussed. Differ from traditional LTCC process flow, a unique process of screen-printing sacrifice layer has been introduced to avoid deformation of the capacitive embedded cavity during lamination or sintering, which leads to a better performance of the sensor. A greater sensitivity of the sensor, comparing with its predecessors, is showed during measurement. Finally ways for future optimization are proposed. (c) 2013 Elsevier B.V. All rights reserved.
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