期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 188, 期 -, 页码 383-388出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2011.12.035
关键词
Energy harvester; MEMS; Thick film; Screen printing; High pressure treatment; PZT; Bimorph
We present a microelectromechanical system (MEMS) based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. Most piezoelectric energy harvesting devices use a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric materials; it provides mechanical support but it also reduces the power output. In our device we replace the support material with another layer of the piezoelectric material. With the absence of an inactive mechanical support all stresses induced by vibrations will be harvested by the active piezoelectric elements. We show experimental results from two types PZT/PZT harvesting devices, one where the Pb(Zr(x)qTi(1-x))O-3 (PZT) thick films are high pressure treated during the fabrication and the other where the treatment is omitted. We find that with the high pressure treatment prior to PZT sintering, the films become denser and the harvester efficiency increases significantly. (C) 2011 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据