期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 175, 期 -, 页码 132-138出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2011.12.034
关键词
MEMS; Unimorph actuator; Fully covered; PZT thick film; Secondary converse Piezoelectric effect
资金
- National Basic Research Program of China (973 Program) [2011CB302101]
- Fundamental Research Funds for the Central Universities [WK2090090008]
This paper investigates the influence of secondary converse piezoelectric effect (SCPE) on the deflection of fully covered piezoelectric (PZT) actuators. An analytical model based on the theory of plates and shells as well as a finite element model (FEM) is developed to predict the deflection of the actuator with and without SCPE. Experimental results of the fabricated disc-type and ring-type thick-film Pa actuators agree with both analytical and FEM results. After the influence of SCPE is eliminated, the deflections of disc-type and ring-type actuators with 0.6 electrode radius ratio increase by similar to 12.7% and similar to 21.2%, respectively. Furthermore, the effects of the electrode size and PZT/Si thickness ratio on SCPE are investigated. The maximum influence of SCPE on deflection can be more than 20% for both types of actuators, which should not be neglected in practical applications. (C) 2011 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据