期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 177, 期 -, 页码 1-9出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2011.08.003
关键词
Micromotor; Liquid bearing; Micromachining; Hydrophobic; Torque; Magnetic drive
资金
- DARPA [31P4Q-10-1-0002]
- UC Davis Nanofabrication Center
This paper examines the performance of rotating microdevices incorporating a liquid bearing to couple a rotating element to a fixed substrate. Liquid bearing technology promises to significantly improve the durability and lifetime of micromechanical motors. Here, the fluid is confined between the rotor and stator using surface patterning of a hydrophobic layer. Magnetic actuation of 10 mm diameter silicon rotor is used to characterize the liquid bearing motor at rotation rates up to 1800 rpm. Bearings with fluid thickness from 20 to 200 mu m are characterized. A minimum torque 01 0.15 mu N-m is required to initiate rotation. At rotation rates above 720 rpm, the rotor wobble is less than +/- 1 mrad and the bearing exhibits viscous friction with a drag coefficient of 1.2 x 10(-3) mu N-m/rpm. The drag performance of the disk-type liquid bearing using H2O as the fluid is approximately 15 times lower than that demonstrated in a micro-ball bearing supported rotor. (C) 2011 Elsevier B.V. All rights reserved.
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