期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 178, 期 -, 页码 88-93出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2012.02.030
关键词
Humidity; Sensor; Dielectrophoresis; ZnO; Nanorods
资金
- National Natural Science Foundation of China [60672002]
- Shanghai Pujiang Project [06PJ14037]
- Shanghai Applied Material Foundation [0202]
In this paper, the capacitive relative humidity sensors based on dielectrophoretically manipulated ZnO nanostructure were constructed and studied. The humidity-sensitive ZnO nanorods were first synthesized by the thermal decomposition technique and deposited among the micromachined electrodes pairs via dielectrophoretic manipulation. The manipulated samples were detected as the capacitive sensors in which the nanostructured ZnO acted as the sensing elements. The capacitive humidity sensors were constructed by detecting the variations of the ZnO dielectric constant changing with the humidity environment. The results showed that the sensor had high humidity sensitivity, good stability, fast response/recovery time and well reproducibility. The dielectrophoresis manipulation can also improve the sensitivity of the sensor efficiently. (C) 2012 Elsevier B.V. All rights reserved.
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