期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 172, 期 2, 页码 462-470出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2011.08.022
关键词
Polystyrene-platinum microcantilever; Focused ion beam; Thermal microactuator; Analytical model; Finite element model
资金
- Australian Research Council (ARC) [DP0878931]
- Australian Microscopy & Microanalysis Research Facility (AMMRF) node at the University of Sydney
- Faculty of Engineering at the University of Wollongong
- Australian Research Council [DP0878931] Funding Source: Australian Research Council
Polymer-metal microcantilever actuators have been fabricated using an innovative approach based on focused ion beam micromachining technology. The fabrication involves depositing a thin metal film onto the surface of the polymer and machining using the ion beam. The microcantilever created is then extracted and transferred to a desirable support using a micromanipulator. This approach demonstrates the potential for maskless and resistless prototyping of cantilevers that can be evaluated for use as MEMS/NEMS actuators. Nanometer-scale displacement of the resulting polystyrene-platinum bimorph microactuator with respect to temperature change is demonstrated via visual monitoring in a scanning electron microscope with a heating stage. The performance of the bimorph cantilever microactuators is verified using both analytical and finite element modeling. (C) 2011 Elsevier B.V. All rights reserved.
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