期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 172, 期 1, 页码 293-300出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2011.06.022
关键词
MEMS; NEMS; Oscillator; Methodology; CMOS design
资金
- European Community [34690]
This work proposes a generic methodology to evaluate the feasibility of designing a Pierce oscillator based on a micro or nanoresonator fabricated with any given CMOS technology and with the constraint of using only one single active transistor. Both the design and the transimpedance gain of the electronics are analytically determined for resonators with capacitive or resistive detection. This approach is applied and validated in the case of (a) an electrostatically actuated clamped-clamped beam resonator using a capacitive transduction, and (b) a piezoresistive crossbeam, both based on a standard 0.13 mu m CMOS technology. Crown Copyright (C) 2011 Published by Elsevier B.V. All rights reserved.
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