Micro-impedance inclinometer with wide-angle measuring capability and no damping effect

This paper reports a high-performance impedance-type inclinometer fabricated in a glass-SU-8-glass sandwich structure for wide-angle measurements with rapid sensing response. The output signal of the proposed-inclinometer is read from a moving-metal pendulum based on the electrical potential measurement scheme. Two types of pendulum mass made by Ga-In-Sn alloy and mercury are used for the inclinometer. The friction between the liquid metal and substrate surfaces is dramatically reduced by applying an organic-based surfactant of SDS. Experimental results show the developed inclinometer has a wide linear range (320 degrees) and a high angle resolution (0.3 degrees). Performance test shows no time lag for the sensor output under a rotation speed of 1/8 rps, and no damping effect for an instant stop from a rotation speed of 45 degrees/s. The developed inclinometer provides a simple yet high-performance solution for tile angle measurement. (C) 2007 Elsevier B.V. All rights reserved.