期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 145, 期 -, 页码 214-223出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2007.12.009
关键词
sliding contact; gap-spacing control; passive air-gap control; DLC coating; boundary lubricated; capacitive sensors
Many advanced microsystems rely on nanometer-resolution in-plane motion between two substrates requiring precise control of gap spacing. Accurately maintained gaps may not only provide desired mechanical response but also enable position-sensing and signal transduction between the substrates. A method of passive gap-spacing control using MEMS-fabricated rigid spacers is proposed. A model to design a low-friction and low-wear interface between the sliding substrates is developed. Prototype parts with hard-coated interfaces and with and without lubrication were fabricated and tested. Sliding friction coefficients of less than 0.1 were achieved on prototype parts with boundary lubrication over a million sliding cycles. Wear life of several million sliding cycles is predicted. (C) 2007 Elsevier B.V. All rights reserved.
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